Tungsten oxide films by radio-frequency magnetron sputtering for near-infrared photonics

Cathodoluminescence Study of Gadolinium–Doped Yttrium Oxide Thin Films Deposited By Radio–Frequency Magnetron Sputtering

A multi–layer gadolinium–doped yttrium oxide thin film was deposited in a combinatorial fashion on a Si (001) substrate using radio–frequency magnetron sputtering. Alternating layers of Y2O3 and Gd were deposited for a total of 9 layers. The film was homogenized in composition by an 850 C 12 hour thermal treatment producing a range of composition from Y1.96Gd0.04O3 – Y1.54Gd0.46O3 in a single f...

Deposition by radio frequency magnetron sputtering of GaV4S8 thin films for resistive random access memory application

Characteristics of ZnO thin films prepared by radio frequency magnetron sputtering

We investigated in this study structural and nanomechanical properties of zinc oxide (ZnO) thin films deposited onto Langasite substrates at 200 C through radio frequency magnetron sputtering with an radio frequency power at 200 W in an O2/Ar gas mixture for different deposition time at 1, 2, and 3 h. Surface morphologies and crystalline structural characteristics were examined using X-ray diff...

Reduced surface roughness of solid thin films prepared by alternating-bias, radio-frequency magnetron sputtering

Surface roughness that is associated with thin-film deposition has a direct effect on the optical, electrical, and mechanical quality of solid-thin-film devices. The effect of using alternating bias during rf-magnetron sputtering of SiO2 on Si substrate was investigated, and it was proven experimentally that modulating the plasma flow by means of alternating bias produces more even deposition o...

Structural and nanomechanical properties of BiFeO3 thin films deposited by radio frequency magnetron sputtering

The nanomechanical properties of BiFeO3 (BFO) thin films are subjected to nanoindentation evaluation. BFO thin films are grown on the Pt/Ti/SiO2/Si substrates by using radio frequency magnetron sputtering with various deposition temperatures. The structure was analyzed by X-ray diffraction, and the results confirmed the presence of BFO phases. Atomic force microscopy revealed that the average f...